ENGS 135: Thin Films and Microfabrication Technology


Alternate years: 16W: 2

The Materials Science of Thin Films, Ohring; Academic Press, 2nd Edition, ISBN 0125249756.

Introduction to Microfabrication, 2nd Edition, Sami Franssila, 978-0-470-74983-8 534pp Hardcover, September 2010


ENGS 24 or equivalent

This course covers the processing aspects of semiconductor and thin film devices. Growth methods, metallization, doping, insulator deposition, patterning, and analysis are covered. There are two major projects associated with the course — an experimental investigation performed in an area related to the student's research or interests, and a written and oral report on an area of thin film technology.