Seminar: The Role of Scanning Probe Microscopy in Nanoscale Semiconductor Device Analysis

Phil Kaszuba, Advisory Engineer, Systems and Technology Group, IBM

Thursday, February 27, 2014, 4:30-5:30pm

Cummings 200

Since the invention of the Atomic Force Microscope (AFM) in 1986, numerous analytical techniques have been developed and implemented on the AFM platform, evolving into what is collectively called the Scanning Probe Microscope (SPM). The SPM has since become established as a mainstream analytical instrument with a continually increasing role in the development of nanoscale semiconductor technologies providing critical data from initial concept to technology development to manufacturing to failure analysis. This presentation will discuss Atomic Force Microscopy (AFM), Scanning Kelvin Probe Microscopy (SKPM), Scanning Capacitance Microscopy (SCM), Conductive-AFM (C-AFM), Magnetic Force Microscopy (MFM), and Scanning Surface Photo Voltage Microscopy (SSPVM). An overview of each technique will be presented along with examples of how each is currently used in the development of new technologies, the monitoring of a manufacturing line, and the failure analysis of nanoscale semiconductor devices. There will also be a discussion on conducting competitive technology analysis.

Refreshments will be provided.

The talk is organized by the IEEE Student Chapter at Dartmouth.

About the Speaker

Phil Kaszuba is an Advisory Engineer for IBM’s Systems and Technology Group. He currently directs the Scanning Probe Microscopy Laboratory at IBM’s Essex Junction, Vt. semiconductor fabrication facility. Phil’s work concentrates on applied SPM for nanoscale semiconductor technology and device analysis. He is currently involved in developing new SPM based analytical techniques for applications in nanoscale semiconductor technology development, fabrication line monitoring, device characterization, and failure analysis. Phil has authored numerous articles and papers and holds a number of U.S. and international patents in the field of scanning probe microscopy.

For more information, contact Rahul Sangwan at rahul.sangwan.th@dartmouth.edu.